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Field Service Solutions | ||||||||
Copyright © 2004 Enigma, Inc. | ||||||||
Wednesday, December 10, 2003 | ||||||||
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10Dec03 | Chamber C offline. Checked RF path and all connections tight. Not sure what problem is, searched knowledge base and found similar issues at Fab 4B and 4C. Will perform tests to determine relevancy and talk to guys in 4B/4C. |
09Dec03 | Heads up- spec drift indicates RF problem in chamber C; Fault #3RFT5. Inspection procedures followed, still indicates high reflected power. |
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DOCUMENT RESULTS
Log | Date | Entry |
Symptom | 09Dec03 | RF-related Spec drift in Ch C |
Symptom | 09Dec03 | High reflected power |
Known | 09Dec03 | Fault Code 3RFTS |
Known | 10Dec03 | Connections tight along RF path |
Known | 10Dec03 | Fabs 4B & 4C had match problems in September & October |
TROUBLESHOOTING LOG
PASSDOWN - 364462
SEARCH / FILTER DOCUMENT RESULTS
09Dec03 09:47 | 3RFTS - reflected power |
FAULT LOG - 364462
Chamber C Offline
MACHINE STATUS - 364462
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Event - 24 HOURS - 48 hours - Week - Month
Installation - PM - CM - Retrofit
CMSE #7852
